Title of article :
Synthesis of fault-tolerant supervisor for automated manufacturing systems: a case study on photolithographic process
Author/Authors :
Kwang-Hyun Cho، نويسنده , , Jong-Tae Lim، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 1998
Keywords :
Fault-tolerance , supervisor. , photolithographicprocess , Discrete event dynamic systems
Journal title :
I E E E Transactions on Robotics and Automation
Journal title :
I E E E Transactions on Robotics and Automation
