A three-dimensional MEMS optical switching module having 100 input and 100 output ports

This paper describes an optical switching module based on microelectromechanical systems (MEMS) two-axis tilt mirror arrays and low-cost highly accurate free-space optics. The MEMS mirror arrays are integrated on singlecrystal silicon wafers and provide reliable switching operation at a low driving voltage. The free-space optics consists of two-dimensional optical fiber and microlens arrays based on low-cost and highly accurate polymerbased components. They provide a compact switching module (approximately 80*60*35 mm [170 cc]) and are assembled passively by using dowel pins. A prototype switch module with 100-ch optical fiber I/O has a low coupling loss of 4.0 dB, a low crosstalk within -60 dB, and switching time of 3 ms.