Author/Authors :
L.P.B.، Katehi, نويسنده , , S.، Mohammadi, نويسنده , , M.B.، Steer, نويسنده , , W.Y.، Liu, نويسنده , , J.، Suryanarayanan, نويسنده , , J.، Nath, نويسنده ,
Abstract :
Toroidal inductors achieve low loss by constraining magnetic flux to a well-defined path and away from ground planes and semiconducting substrates. This paper presents a micromachined implementation of the toroidal inductor, with focus primarily on microwave integrated circuits on a low-resistivity silicon wafer achieving a Q of 22 and a self-resonant frequency greater than 10 GHz. A verified analytic model is developed.
