• DocumentCode
    18441
  • Title

    Preliminary Feasibility Study of Silicon on Insulator )SOI( Microphones

  • Author

    Sung Kwon Cho استاد مشاور , William W. Clark استاد مشاور , Jeffrey Vipperman استاد راهنما

  • University
    university of pittsburgh
  • Grade
    نامعلوم
  • Major
    Master of Science in Mechanical Engineering )Mechanical Engineering(
  • Number of pages
    0
  • Publish Date
    2004
  • Keyword

    Silicon , microphone membranes , SOI , MEMS

  • Note
    01
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=17&DC=18441