DocumentCode :
19450
Title :
Design and Analysis of End-Effector Systems for Scribing on Silicon
University :
Brighan Young University Browse
Grade :
نامعلوم
Major :
PhD )Mechanical Engineering(
Number of pages :
0
Publish Date :
2003
Keyword :
chemomechanical , end-effector , Compliant Mechanisms , silicon machining , scribing , chemomechanical machining
Note :
01
Language :
انگليسي
Link To Document :
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