• DocumentCode
    2020
  • Title

    Fabrication and characterization of AlN thin film bulk acoustic wave resonator

  • Author

    Qing-Ming Wang استاد راهنما , John A. Barnard استاد مشاور , Patrick Smolinski استاد مشاور

  • University
    university of pittsburgh
  • Grade
    دكتري
  • Major
    Doctor of Philosophy
  • Number of pages
    0
  • Publish Date
    2006
  • Keyword

    Thin film , BAW resonator , Piezoelectricity , RF filter

  • Note
    01
  • Language
    انگليسي