DocumentCode
2020
Title
Fabrication and characterization of AlN thin film bulk acoustic wave resonator
Author
Qing-Ming Wang استاد راهنما , John A. Barnard استاد مشاور , Patrick Smolinski استاد مشاور
University
university of pittsburgh
Grade
دكتري
Major
Doctor of Philosophy
Number of pages
0
Publish Date
2006
Keyword
Thin film , BAW resonator , Piezoelectricity , RF filter
Note
01
Language
انگليسي
Link To Document