DocumentCode
3447
Title
Synthesis and characterization of low pressure chemically vapor deposited boron nitride and titanium nitride films
Author
Levy Roland A. استاد راهنما , Ravindra N. M. استاد مشاور
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
دكتري
Major
Doctor of Philosophy )Committee for the Interdisciplinary Program in Materials Science and Engineering(
Number of pages
0
Publish Date
2000
Keyword
Titanium nitride , Low Pressure Chemically Vapor Deposited Films , boron nitride
Note
01
Language
انگليسي
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