DocumentCode
3464
Title
Mechanisms of layer-transfer related to silicon-on-insulator structures
Author
Carr William N. استاد راهنما , Usenko Alexander Y. استاد مشاور , Chabal Yves Jean استاد مشاور
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
دكتري
Major
Doctor of Philosophy )Materials Science and Engineering(
Number of pages
0
Publish Date
2004
Keyword
Plasma processing , Silicon-on-insulator , Wafer bonding , Hydrogenation , Layer exfoliation
Note
01
Language
انگليسي
Link To Document