DocumentCode
3665
Title
Deposition and characterization of magnetron sputtered BCC tantalum
Author
Sosnowski Marek استاد راهنما , Cornely Roy H. استاد مشاور
University
Van Houten Library )new Jersey Institute Of Technology(
Grade
دكتري
Major
Doctor of Philosophy )Department of Electrical and Computer Engineering(
Number of pages
0
Publish Date
2003
Keyword
tantalum , sputtering , BCC phase , Beta phase , Tantalum nitride
Note
01
Language
انگليسي
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