DocumentCode
3787
Title
Electrostatic micro actuators for mirror and other applications
Author
Federici John Francis استاد مشاور , Farmer Kenneth Rudolph استاد راهنما
University
New Jersey Institute Of Technology
Grade
دكتري
Major
Doctor of Philosophy
Number of pages
0
Publish Date
2001
Keyword
Micro-electro-mechanical systems )MEMS( , optical signal processing , electrostatic micro actuators , capacitance-based quasi-static design , electrostatic mirror devices
Note
01
Language
انگليسي
Link To Document