DocumentCode
4049
Title
Miniaturized Diffraction Based Interferometric Distance Measurement Sensor
Author
Kurfess Thomas استاد مشاور , Degertekin F. Levent استاد راهنما
University
Georgia Institute Of Technology
Grade
دكتري
Major
Doctor of Philosophy
Number of pages
0
Publish Date
2004
Keyword
Scanning , MEMS , Interferometer , Metrology
Note
01
Language
انگليسي
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