DocumentCode
4776
Title
Electrical studies of silicon and low K dielectric material
Author
Lionel C. Kimerling. استاد راهنما
University
Dspace at Mit Libraries
Grade
دكتري
Major
Thesis )Ph.D.(
Number of pages
0
Publish Date
1999
Keyword
Materials Science and Engineering.
Note
01
Language
انگليسي
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