• DocumentCode
    4776
  • Title

    Electrical studies of silicon and low K dielectric material

  • Author

    Lionel C. Kimerling. استاد راهنما

  • University
    Dspace at Mit Libraries
  • Grade
    دكتري
  • Major
    Thesis )Ph.D.(
  • Number of pages
    0
  • Publish Date
    1999
  • Keyword

    Materials Science and Engineering.

  • Note
    01
  • Language
    انگليسي