DocumentCode
4869
Title
Advanced Thin Film Electroacoustic Devices Avancerade Elektroakustiska Tunnfilmskomponenter
University
Diva Partal academic Arshive Online
Grade
دكتري
Major
Doctoral thesis
Number of pages
0
Publish Date
2007
Keyword
lamb wave devices , liquid sensor , reactive sputtering , Aluminum nitride , FBAR , shear mode resonator , Temperature compensation
Note
01
Language
انگليسي
Link To Document