DocumentCode
8749
Title
Surface Mechanisms in Low-Temperature plasma Depowition of Silicon
Author
Gregory N. Parsons استاد راهنما
University
Releigh North Carolina state University
Grade
نامعلوم
Major
PhD)Chemical Engineering(
Number of pages
0
Publish Date
2002
Keyword
PEVCD thin film deposition amorphous silicon surface diffusion atomic force microscopy dynamic scaling
Note
01
Language
انگليسي
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