پديد آورندگان :
Fathalilou M. نويسنده , SHIRAZI K. R. نويسنده , Alizadeh Y. نويسنده , Motallebi A. نويسنده , Yagubizade H. نويسنده , Rezazadeh Gh. نويسنده
چكيده لاتين :
In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force and
mechanical shock for different cases have been studied. The governing equations whose solution
holds the answer to all our questions about the mechanical behavior is the nonlinear elastoelectrostatic
equations. Due to the nonlinearity and complexity of the derived equations analytical
solution are not generally available; therefore, the obtained differential equations have been solved
by using of a step by step linearization method (SSLM) and a Galerkin based reduced order
model. The pull-in voltage of the structure and the effect of shock forces on the mechanical
behavior of undeflected and electrostatically deflected microbeam have been investigated. The
proposed models capture the other design parameters such as intrinsic residual stress from
fabrication processes and the nonlinear stiffening or stretching stress due to beam deflection.
