شماره ركورد كنفرانس :
174
عنوان مقاله :
رسانايي نوع P در N:SnO2 با استفاده از روش APCVD
پديدآورندگان :
ملكي مسعوده نويسنده دانشگاه گيلان - گروه فيزيك , روضاتي محمد نويسنده دانشگاه گيلان - گروه فيزيك
كليدواژه :
ساختار كريستال , لايه هاي شيشه اي , بخار شيميايي , اپتيك غيرخطي و حسگر گاز , رسانا نوع P در N:SnO2 , نواقص شبكه , روش APCVD
عنوان كنفرانس :
دومين كنفرانس رشد بلور ايران
چكيده فارسي :
We report the N doped SnO2 films with p-type conduction via air pressure chemical vapor deposition technique.
Effect of nitrogen doping in different substrate temperatures on samples structure were analyzed by XRD
measurement. Shift of peak positions at low and high temperatures toward lower and upper positions indicated
substitution of N for O and Sn respectively. Our investigation showed increase of grain size due to substrate
temperature and atomic ratio of N/Sn increasing. Changes in thin film morphology were analyzed by FESEM
measurement. XPS studying confirmed the presence of nitrogen in the SnO2 film as an acceptor
چكيده لاتين :
We report the N doped SnO2 films with p-type conduction via air pressure chemical vapor deposition technique.
Effect of nitrogen doping in different substrate temperatures on samples structure were analyzed by XRD
measurement. Shift of peak positions at low and high temperatures toward lower and upper positions indicated
substitution of N for O and Sn respectively. Our investigation showed increase of grain size due to substrate
temperature and atomic ratio of N/Sn increasing. Changes in thin film morphology were analyzed by FESEM
measurement. XPS studying confirmed the presence of nitrogen in the SnO2 film as an acceptor
شماره مدرك كنفرانس :
4474719