شماره ركورد كنفرانس :
5328
عنوان مقاله :
Influence of annealing processing on of nanoparticle size on surface of CZO films
پديدآورندگان :
Rahimi Nasim Department of Physics, Malayer University, Malayer, Iran , Dalouji Vali dalouji@yahoo.com Department of Physics, Malayer University, Malayer, Iran
كليدواژه :
nanoparticle size , Atomic Force Microscopy , Zinc oxide , RMS roughness.
عنوان كنفرانس :
بيست و سومين كنفرانس شيمي فيزيك انجمن شيمي ايران
چكيده فارسي :
The CZO films were deposited for 75minon glass substrates using RF magnetron cosputtering at room temperature. The wide variation in the surface morphology and grain sizes reveal the importance of the temperature in the synthesis of these film samples. RMS roughness of CZO films in as deposited films were 4.18nm and in 400ºC was 2.87nm and 500ºC, 600ºC were 4.48, 6.02nm, respectively
