Author/Authors :
TAŞ, Seher Dokuz Eylül Üniversitesi - Mühendislik Fakültesi, Fen Bilimleri Enstitüsü, Metalurji ve Malzeme Mühendisliği, Elektronik Malzemeler Üretimi ve Uygulama Merkezi (EMUM) - Metalurji ve Malzeme Mühendisliği Bölümü, Turkey , EROL, Mustafa Dokuz Eylül Üniversitesi - Mühendislik Fakültesi, Fen Bilimleri Enstitüsü, Metalurji ve Malzeme Mühendisliği - Metalurji ve Malzeme Mühendisliği Bölümü, Turkey , TOPARLI, Mustafa Dokuz Eylül Üniversitesi - Mühendislik Fakültesi, Elektronik Malzemeler Üretimi ve Uygulama Merkezi (EMUM), Fen Bilimleri Enstitüsü, Nanobilim ve Nanomühendislik - Metalurji ve Malzeme Mühendisliği Bölümü, Turkey , ÇELİK, Erdal Dokuz Eylül Üniversitesi - Mühendislik Fakültesi, Elektronik Malzemeler Üretimi ve Uygulama Merkezi (EMUM), Fen Bilimleri Enstitüsü, Nanobilim ve Nanomühendislik - Metalurji ve Malzeme Mühendisliği Bölümü, Turkey
Abstract :
Tin oxide (SnO2) is semiconductor metal-oxide which is frequently used and able to finds search field in a wide range. SnO2 has been found applications in several fields like gas sensors and solar cells as thin films. The SnO2 thin films have excellent performance as a gas sensors. Although there are many methods for production of SnO2 thin film, magnetron sputtering device is usually used because of its simple, inexpensive and easy to be controlled for the desired film thickness. The stability of SnO2 of thin film and similar sustainability of production processes depend on used target materials. Target materials are produced from SnO2 powders in form of pellets. By adding binder material to the produced powders, the target materials are performed and sintered by using hot isostatic pressing (HIP). Thus the powders are made into pellets that diameter of the target will be used. Purity, density and average grain size of SnO2 powders are important in order to produce stable SnO2 thin film. In this study, SnO2 powders were produced by sol–gel technique and their particle size d,stribution and characterization were analyzed using particle size measurement and X-ray diffraction (XRD) machines.
NaturalLanguageKeyword :
SnO2 , Sol , gel , Target material , Gas sensor
