Author/Authors
Wayne Huang، نويسنده , , Subramanian Tamilmani، نويسنده , , Srini Raghavan، نويسنده , , Robert Small، نويسنده ,
DocumentNumber
1284927
Title Of Article
Dissolution of copper thin films in hydroxylamine-based solutions
شماره ركورد
9158
From Page
365
NaturalLanguageKeyword
Hydroxylamine , copper CMP , Corrosion inhibitors
JournalTitle
Studia Iranica
To Page
372
To Page
372
Link To Document