Title :
Scanning acoustic interference microscope with wedge delay line
Author :
Chubachi, N. ; Okazaki, Hiroshi
Author_Institution :
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Abstract :
The variable acoustic delay line employing a wedge can be successfully introduced to accomplish a novel interference microscope. This interference microscope can be easily established only by substituting a wedge for the specimen mount in the conventional scanning acoustic microscope. The acoustic velocity of as-sputtered ZnO film is measured with this microscope at a frequency of 150 MHz. The acoustic velocity of a longitudinal wave along the c-axis in the ZnO film is determined to be 6.3 km/s.
Keywords :
acoustic microscopes; ultrasonic delay lines; ultrasonic equipment; ultrasonic velocity measurement; 150 MHz; C-axis; acoustic velocity; as-sputtered ZnO films; interference microscope; longitudinal wave; scanning acoustic microscope; ultrasonic equipment; variable acoustic delay line; wedge delay line;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840077
