Title :
Monolithic integration of GaAs MSM photodetector and SiO2/Si3N4 dielectric optical waveguide
Author :
Aboudou, A. ; Goutain, E. ; Vilcot, J.P. ; Francois, M. ; Joannes, L. ; Decoster, D.
Author_Institution :
Univ. des Sci. et Tech. de Lille-Flandres-Artois, Villeneuve d´´Ascq, France
Abstract :
A photonic integrated circuit is presented that comprises a GaAs metal-semiconductor-metal photodetector and an SiO2/Si3N4 dielectric optical waveguide made on a GaAs substrate. A grating is used for light injection and coupling with the detector is achieved using the evanescent field coupling technique.
Keywords :
III-V semiconductors; gallium arsenide; integrated optoelectronics; metal-semiconductor-metal structures; optical waveguides; photodetectors; silicon compounds; GaAs; GaAs-Si 3N 4-SiO 2-GaAs; MSM photodetector; coupling; dielectric optical waveguide; evanescent field coupling technique; light injection; photonic integrated circuit;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19920032
