Title :
Transparent Flexible Substrates Based on Polyimides with Aluminum Doped Zinc Oxide (AZO) Thin Films
Author :
Park, Hyo Jun ; Park, Jin-Woo ; Jeong, Se-Young ; Ha, Chang-Sik
Author_Institution :
Dept. of Polymer Sci. & Eng., Pusan Nat. Univ., Busan, South Korea
Abstract :
In this paper, transparent flexible substrates based on polyimides (PIs) with aluminum doped zinc oxide (AZO) thin films for organic electroluminescent devices have been prepared. PI film based on 2,2´-bis-(3,4-dicarboxyphenyl) hexafluoropropanedianhydride (6FDA) and 2,2´-bis-(trifluoromethyl)-4,4´-diaminobiphenyl (TFDB) were used for transparent flexible substrates. AZO thin films were prepared at two substrate deposition temperatures of 100°C and 200°C with a typical radio-frequency (r.f.) planar magnetron sputtering system. The sheet resistance and the optical transmission properties for AZO films on the fluorinated PI substrate were comparable with those for the AZO films on a glass substrate. The substrate properties were better when the deposition temperature was higher.
Keywords :
II-VI semiconductors; aluminium; conducting polymers; electroluminescent devices; semiconductor thin films; sputter deposition; substrates; zinc compounds; 100 C; 200 C; AZO; ZnO:Al; aluminum doped zinc oxide; flexible substrates; optical transmission property; organic electroluminescent device; polyimide film; polyimides; radio-frequency planar magnetron sputtering system; sheet resistance; thin films; transparent conducting film; Aluminum; Electroluminescent devices; Optical films; Polyimides; Sputtering; Substrates; Temperature; Thin film devices; Transistors; Zinc oxide; Aluminum doped zinc oxide (AZO); flexible substrate; polyimide (PI); sheet resistance; transparent conducting film;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2005.851487
