Title :
On-chip switching for DC parametric testing
Author :
Walton, A.J. ; Robertson, J.M. ; Holwill, R. ; Moore, Brad
Author_Institution :
University of Edinburgh, Edinburgh Microfabrication Facility, Department of Electrical Engineering, Edinburgh, UK
Abstract :
The concept of on-chip switching for parametric testing of semiconductor processing is introduced. The feasibility of this approach is demonstrated for contact chain and diode-connected MOSFETs.
Keywords :
field effect integrated circuits; integrated circuit technology; integrated circuit testing; process control; DC parametric testing; IC technology; contact chain; diode-connected MOSFETs; onchip switching; process control chip; semiconductor processing;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19850300
