Title :
Effect of the inside profile of a hollow cathode on the plasma plume
Author :
Gandhi, Vinitkumar J. ; Mahajan, Satish M.
Author_Institution :
Dept. of Electr. Eng., Tennessee Technol. Univ., Cookeville, TN, USA
fDate :
8/1/1992 12:00:00 AM
Abstract :
The effect of the inside profile of a hollow cathode on the intensity of plasma plume has been studied in a low-pressure (~3-torr) argon discharge. The effectiveness of three different `inside´ profiles of a hollow cathode was compared by performing emission spectroscopy on the plasma plume in each case. A conical-profile hollow cathode produced a plasma plume that was much more intense than the one in a commonly used cylindrical-profile hollow cathode
Keywords :
argon; glow discharges; plasma diagnostics; 3 torr; Ar discharge; conical-profile hollow cathode; cylindrical-profile hollow cathode; emission spectroscopy; hollow cathode; inside profile; intensity; low pressure discharge; plasma plume; Argon; Biological materials; Cathodes; Current density; Engine cylinders; Plasma applications; Plasma chemistry; Plasma density; Plasma materials processing; Spectroscopy;
Journal_Title :
Plasma Science, IEEE Transactions on
