Title :
Vibrating silicon diaphragm micromechanical gyroscope
Author :
Harris, Andrew J. ; Burdess, J.S. ; Wood, David ; Cruickshank, J. ; Cooper, G.
Author_Institution :
Newcastle upon Tyne Univ.
fDate :
8/31/1995 12:00:00 AM
Abstract :
The design and operation of a micromechanical gyroscope based on a vibrating diaphragm loaded with an inertial mass is described. Capacitive actuation and sensing methods are employed. Preliminary results are presented which show that mechanical and electrical coupling limit current performance which could be improved to give noise equivalent rate of turn better than 0.14°/s
Keywords :
elemental semiconductors; gyroscopes; micromachining; micromechanical devices; silicon; Si; capacitive actuation; capacitive sensing methods; electrical coupling; inertial mass; mechanical coupling; micromechanical gyroscope; noise equivalent rate; vibrating diaphragm;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951070
