Materials modification using intense ion beams

Author

Renk, Timothy J. ; Provencio, Paula P. ; Prasad, Somuri V. ; Shlapakovski, Anatoli S. ; Petrov, Anatoly V. ; Yatsui, Kiyoshi ; Jiang, Weihua ; Suematsu, Hisayuki

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

92

Issue

7

fYear

2004

fDate

7/1/2004 12:00:00 AM

Firstpage

1057

Lastpage

1081

Abstract

Pulsed intense ion beams have been developed for applications including surface modification and alloying, and thin-film and nanopowder synthesis. Rapid thermal processing with ions is quite promising for large-scale commercial use, due to the high specific ion energy deposition (joules per cubic centimeter) without reflection, and to the relative efficiency and low cost of the pulsed power ion-beam drivers compared to other high-kinetic energy alternatives. We discuss in this paper the basis for the use of ions in materials processing and the methods of beam formation and impingement on material to be treated, and give examples of recent and ongoing work in materials processing.

Keywords

ion beam assisted deposition; ion beam effects; iron alloys; metallic thin films; rapid thermal processing; stainless steel; surface alloying; surface roughness; titanium alloys; FeCCr; TiFe; high specific ion energy deposition; materials processing; nanopowder synthesis; pulsed intense ion beam effect; pulsed power ion-beam drivers; rapid thermal processing; surface alloying; surface modification; thin-film; Electron beams; Inorganic materials; Ion beams; Ion sources; Laboratories; Laser beams; Materials processing; Mechanical factors; Optical materials; Transistors;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/JPROC.2004.829024

Filename

1306678