• DocumentCode
    1017253
  • Title

    Computer-aided design of a magnetron sputtering cathode

  • Author

    Perlov, C.M. ; Brauer, J.R.

  • Author_Institution
    Magnetic Peripherals, Inc., Minneapolis, MN
  • Volume
    22
  • Issue
    5
  • fYear
    1986
  • fDate
    9/1/1986 12:00:00 AM
  • Firstpage
    831
  • Lastpage
    833
  • Abstract
    A finite element computer program is used to aid the design of a magnetron sputtering cathode. The calculated magnetic fields are shown to accurately predict the wear of the sputtering target. New designs are also evaluated using the finite element program.
  • Keywords
    FEM; Finite-element method (FEM); Magnetic films/devices; Magnetrons; Sputtering; Anodes; Cathodes; Data systems; Design automation; Electrons; Finite element methods; Magnetic analysis; Magnetic fields; Magnetic flux; Sputtering;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1986.1064418
  • Filename
    1064418
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1017253