DocumentCode
1017736
Title
Valence band structure of GexSi1-x for hole transport calculation
Author
Fu, Ying ; Grahn, Kaj J. ; Willander, Magnus
Author_Institution
Dept. of Phys. & Meas. Technol., Linkoping Univ., Sweden
Volume
41
Issue
1
fYear
1994
fDate
1/1/1994 12:00:00 AM
Firstpage
26
Lastpage
31
Abstract
We have calculated the hole densities of states and the velocities as functions of energy in strained and relaxed p-type GexSi 1-x layers grown on ⟨001⟩ Si substrates. It is shown that the nonparabolic and nonspherical effects are very large in the energy range of (0, 0.2 eV) measured from the heavy hole band edge. Deeper into the valence band, the bands gradually become parabolic and spherical. For most applications, the impurity doping concentration is below 1020 cm-3. For 1020 cm-3 p-type doped Si, the Fermi level is 77.3 meV at 77 K. It is therefore concluded that the nonparabolic and nonspherical effects must be taken into proper consideration when investigating the transport properties of p-type GexSi1-x samples. The calculated data of both relaxed and strained GexSi1-x valence band structures are curve fitted and a data library is built up for further study of the hole transport properties. The mobility and the diffusion coefficient are largely affected when the doping concentration is increased. It is found that at high doping concentration the contributions from the light hole and spin split-off bands become very important, they can become even larger than the contribution from the heavy hole band, even if their densities of states are smaller than that of the heavy hole band
Keywords
Fermi level; Ge-Si alloys; band structure of crystalline semiconductors and insulators; carrier lifetime; carrier mobility; electrical conductivity of crystalline semiconductors and insulators; electronic density of states; semiconductor doping; semiconductor materials; valence bands; 〈001〉 substrates; 0 to 0.2 eV; 77 K; 77.3 meV; Fermi level; GexSi1-x; GeSi-Si; Si; Si substrates; diffusion coefficient; heavy hole band; hole densities of states; hole transport calculation; hole velocities; impurity doping concentration; light hole band; mobility; nonparabolic effects; nonspherical effects; p-type semiconductor; relaxed layers; spin splitoff band; strained layers; valence band structure; Capacitive sensors; Energy measurement; Impurities; Libraries; Light scattering; Optical scattering; Semiconductor device doping; Semiconductor devices; Substrates; Tensile stress;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.259616
Filename
259616
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