DocumentCode
1018079
Title
Effect of ion mass and charge State on transport of vacuum arc plasmas through a biased magnetic filter
Author
Byon, Eungsun ; Kim, Jong-Kuk ; Kwon, Sik-Chol ; Anders, André
Author_Institution
Surface Eng. Dept., Korea Inst. of Machinery & Mater., Changwon, South Korea
Volume
32
Issue
2
fYear
2004
fDate
4/1/2004 12:00:00 AM
Firstpage
433
Lastpage
439
Abstract
The effect of ion mass and charge state on plasma transport through a 90°-curved magnetic filter is experimentally investigated using a pulsed cathodic arc source. Graphite, copper, and tungsten were selected as test materials. The filter was a bent copper coil biased via the voltage drop across a low-ohm, "self-bias" resistor. Ion transport is accomplished via a guiding electric field, whose potential forms a "trough" shaped by the magnetic guiding field of the filter coil. Evaluation was done by measuring the filtered ion current and determination of the particle system coefficient, which can be defined as the ratio of filtered ion current, divided by the mean ion charge state, to the arc current. It was found that the ion current and particle system coefficient decreased as the mass-to-charge ratio of ions increased. This result can be qualitatively interpreted by a very simple model of ion transport that is based on compensation of the centrifugal force by the electric force associated with the guiding potential trough.
Keywords
plasma diagnostics; plasma transport processes; vacuum arcs; biased magnetic filter; centrifugal force; charge state; copper; filter coil; filtered ion current; graphite; ion mass; ion transport; mass-to-charge ratio; pulsed cathodic arc source; tungsten; vacuum arc plasma transport; voltage drop; Coils; Copper; Filters; Magnetic separation; Materials testing; Plasma materials processing; Plasma sources; Plasma transport processes; Tungsten; Vacuum arcs; Arc plasma; cathodic vacuum arc; ion charge states; macroparticle filter; plasma transport;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2004.826363
Filename
1308489
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