HighiHcperpendicular anisotropy Nd -Fe-B sputtered films

Film samples of Nd2Fe14B which exhibit perpendicular anisotropy have been synthesized by selectively thermalized sputtering onto heated substrates. Minor hysteresis loops measured with fields up to 20 kOe perpendicular to the film plane exhibited a remanent moment of 9.3 kG and an intrinsic coercive force,iHc, of 14.8 kOe at room temperature. The easy axis of magnetization was perpendicular to the film plane which correlated with a preferential texturing of the c-axis out of the film plane as observed by x-ray diffraction. Effective large perpendicular anisotropy constants of 1.2 × 10⁷erg/cc have been observed. Films sputtered at deposition rates lower than 1.8 A/sec exhibited perpendicular anisotropy while those deposited at rates greater than this exhibited in the plane anisotropy.