DocumentCode
1020004
Title
Programmable via Using Indirectly Heated Phase-Change Switch for Reconfigurable Logic Applications
Author
Chen, K.N. ; Krusin-Elbaum, L. ; Newns, D.M. ; Elmegreen, B.G. ; Cheek, R. ; Rana, N. ; Young, A.M. ; Koester, S.J. ; Lam, C.
Author_Institution
IBM T.J. Watson Res. Center, Yorktown Heights
Volume
29
Issue
1
fYear
2008
Firstpage
131
Lastpage
133
Abstract
A novel concept for a programmable via using an indirectly heated phase-change switch is proposed and fabricated successfully. In this device concept, circuits associated with the programmable via are decoupled from the configuration circuits by using an independently contacted heater electrode. We demonstrate the prototype device in a standard 180-nm CMOS copper back-end technology.
Keywords
CMOS digital integrated circuits; logic circuits; phase changing circuits; CMOS; configuration circuits; heater electrodes; indirectly heated phase-change switch; reconfigurable logic applications; CMOS logic circuits; CMOS technology; Field programmable gate arrays; Fuses; Integrated circuit interconnections; Logic arrays; Phase change materials; Prototypes; Reconfigurable logic; Switches; Phase change; programmable; reconfigurable; via;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2007.912016
Filename
4408722
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