• DocumentCode
    1021364
  • Title

    Low-loss high-silica single-mode channel waveguides

  • Author

    Takato, N. ; Yasu, M. ; Kawachi, M.

  • Author_Institution
    NTT Ibaraki Electrical Communication Laboratory, Tokai, Japan
  • Volume
    22
  • Issue
    6
  • fYear
    1986
  • Firstpage
    321
  • Lastpage
    322
  • Abstract
    Low-loss high-silica single-mode channel optical waveguides of 0.1 dB/cm have been fabricated on crystal silicon substrates with fibre coupling losses of less than 0.05 dB by flame hydrolysis deposition and reactive ion etching. Directional couplers have also been fabricated with excess loss of 0.5 dB by this waveguide fabrication technique.
  • Keywords
    directional couplers; integrated optics; optical couplers; optical waveguides; optical workshop techniques; sputter etching; Si crystal substrate; directional couplers; fabrication technique; flame hydrolysis deposition; high-silica type; integrated optics; low-loss type; optical waveguides; optical workshop techniques; reactive ion etching; single-mode channel waveguides;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19860220
  • Filename
    4256411
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1021364