Evaluation of voltage dependent series resistance of epitaxial varactor diodes at microwave frequencies

The series resistance of a high-quality varactor diode is primarily determined by the resistance of the semiconductor material close to the junction. With increasing reverse bias, the width of the space-charge region becomes greater, and the series resistance decreases. Theoretical models of graded and step junctions have been assumed, and calculations have been made of the series resistance as a function of bias. Epitaxial silicon diodes have been measured for series resistance as a function of bias by using the transmission loss method at 6 to 12 Gc/s, with the diode mounted across a reduced-height waveguide. The variation of series resistance with bias agrees well with the theoretical calculations. By measuring of the 3-dB bandwidth of the series resonance of the diode mounted in the reduced-height waveguide, the junction capacitance and the effective series inductance of the package also can be determined. Because the width of the space-charge region must vary with applied voltage in order to obtain the varactor characteristic, the diode cannot have zero-series resistance at zero-volt bias. The minimum possible series resistance is a function of the breakdown voltage and increases with increasing breakdown voltage. Calculations of the maximum possible cutoff frequency as a function of the diode breakdown voltage are presented for both graded and step junction silicon varactors. A plot of series resistance vs. reverse bias can be used to determine the impurity concentration profile in the epitaxial film. The impurity concentration profile can also be determined by measuring the capacitance vs. reverse bias, a technique which has been in use for some time. However the former method appears to be more accurate in that it is independent of junction area.