Title :
Anode spot plasma deposition of insulating layers on aluminum
Author :
Ghaemi, Mohammad S. ; Cooney, Jamie ; Tao, Jin ; Lim, Wee-beng ; Lonngren, Karl E.
Author_Institution :
Iowa Univ., Iowa City, IA, USA
fDate :
4/1/1990 12:00:00 AM
Abstract :
The deposition of an insulating layer upon an aluminum plate in an argon plasma is described. The process is effected in a low-power DC discharge to which a small amount of sulfur hexafluoride (SF6) has been added, causing the formation of anode spots at sharp metallic surfaces. The insulator is deposited in the region beneath the spot
Keywords :
aluminium; plasma deposition; Al; Ar-SF6; anode spot plasma deposition; insulating layers; low-power DC discharge; sharp metallic surfaces; Aluminum; Anodes; Argon; Cities and towns; Gas insulation; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Surface discharges;
Journal_Title :
Plasma Science, IEEE Transactions on