DocumentCode :
1026181
Title :
Anode spot plasma deposition of insulating layers on aluminum
Author :
Ghaemi, Mohammad S. ; Cooney, Jamie ; Tao, Jin ; Lim, Wee-beng ; Lonngren, Karl E.
Author_Institution :
Iowa Univ., Iowa City, IA, USA
Volume :
18
Issue :
2
fYear :
1990
fDate :
4/1/1990 12:00:00 AM
Firstpage :
249
Lastpage :
251
Abstract :
The deposition of an insulating layer upon an aluminum plate in an argon plasma is described. The process is effected in a low-power DC discharge to which a small amount of sulfur hexafluoride (SF6) has been added, causing the formation of anode spots at sharp metallic surfaces. The insulator is deposited in the region beneath the spot
Keywords :
aluminium; plasma deposition; Al; Ar-SF6; anode spot plasma deposition; insulating layers; low-power DC discharge; sharp metallic surfaces; Aluminum; Anodes; Argon; Cities and towns; Gas insulation; Plasma applications; Plasma density; Plasma materials processing; Plasma measurements; Surface discharges;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/27.131029
Filename :
131029
Link To Document :
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