Title :
Application of LFB acoustic microscope to film thickness measurements
Author :
Kushibiki, J. ; Chubachi, N.
Author_Institution :
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Abstract :
The line-focus-beam (LFB) acoustic microscope is applied to measure the precise thickness of thin films using the velocity dispersion of leaky waves in layered samples. The measurement principle and accuracy are investigated theoretically and experimentally, taking a configuration of Au-film on fused quartz. It is demonstrated at 225 MHz that the thickness resolution better than 2 Ã… is achieved for a 3000 Ã… sample using leaky pseudosurface acoustic waves.
Keywords :
acoustic microscopy; surface acoustic waves; thickness measurement; 225 MHz; 3000 A; Au-SiO2; Au-film on fused quartz; LFB acoustic microscope; accuracy; film thickness measurements; layered samples; leaky pseudosurface acoustic waves; line focus beam acoustic microscope; operation; thickness resolution; thin films; velocity dispersion of leaky waves;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19870467
