Title :
Optically excited resonant beam pressure sensor
Author :
Uttamchandani, D. ; Thornton, K.E.B. ; Culshaw, B.
Author_Institution :
University of Strathclyde, Department of Electronic & Electrical Engineering, Glasgow, UK
Abstract :
Micromechanical silicon beams fabricated by anisotropic etching techniques are coated with a thin layer of chromium. An intensity-modulated laser beam focused on the beam generates transverse vibrations which are detected interferometrically. In the letter we report how the vibration frequency changes with temperature and pressure applied to the beam.
Keywords :
measurement by laser beam; pressure transducers; silicon; Cr thin film; Si beams; anisotropic etching techniques; intensity-modulated laser beam; interferometry; micromechanical beams in silicon; optical fibre compatible; optically excited resonant beam; resonant beam pressure sensor; resonant frequency; temperature; transverse vibrations; vibration frequency;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19870921
