DocumentCode :
1039162
Title :
RF power transistor metallization failure
Author :
Black, James R.
Author_Institution :
Central Research Laboratories, Phoenix, Ariz.
Volume :
17
Issue :
9
fYear :
1970
fDate :
9/1/1970 12:00:00 AM
Firstpage :
800
Lastpage :
803
Abstract :
RF power transistors employing aluminum metallization can degrade and fail when the aluminum carries high-current densities at elevated temperatures. Two distinct mechanisms promoted by electromigration lead to failure. These are 1) the growth of etch pits filled with aluminum which penetrate and short the emitter-base junctions and 2) a reconstruction of the metallization which increases the electrical resistance reducing the device efficiency.
Keywords :
Aluminum; Conductive films; Current density; Degradation; Electromigration; Metallization; Power transistors; Radio frequency; Silicon; Temperature;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1970.17077
Filename :
1476261
Link To Document :
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