Title :
On the Dynamic Response of Electrostatic MEMS Switches
Author :
Leus, Vitaly ; Elata, David
Author_Institution :
Technion Israel Inst. of Technol., Haifa
Abstract :
The undamped dynamic response of electrostatic MEMS switches that are driven by a step-function voltage is investigated. A systematic analysis using energy methods is presented. An analytic expression for switching time is derived and this expression may be used as a design rule for electrostatic switches. The analytic predictions are validated experimentally using test structures with parallel-plates actuators. It is shown that the analysis is also applicable for switches with more general geometry.
Keywords :
dynamic response; electrostatic actuators; microswitches; electrostatic MEMS switches; parallel-plates actuators; step-function voltage; undamped dynamic response; Dynamic pull-in; dynamic response; electrostatic actuators; electrostatic switches;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2007.908752
