Deformable Polymer Adaptive Optical Mirrors

Author

Friese, Christoph ; Zappe, Hans

Author_Institution

Freiburg Univ., Reutlingen

Volume

17

Issue

1

fYear

2008

Firstpage

11

Lastpage

19

Abstract

The design, fabrication, and evaluation of deformable polymer-based micromirror devices for adaptive optic applications are described. For the mirror membranes, a freestanding polymer foil is used, which features key advantages with respect to its mechanical behavior when compared with the silicon-micromachined membranes. The fabrication technology, mirror-membrane design, packaging, and operation in a feedback-controlled closed-loop system are outlined. The feasibility for the use of the prototypes in advanced adaptive optic systems is evaluated.

Keywords

adaptive optics; foils; membranes; micro-optomechanical devices; micromachining; micromirrors; optical design techniques; optical fabrication; optical polymers; silicon; adaptive optical mirrors; advanced adaptive optic systems; deformable polymer-based micromirror devices; feedback-controlled closed-loop system; freestanding polymer foil; micro-electromechanical devices; mirror membrane design; optical fabrication; silicon-micromachined membranes; Adaptive optics; SU-8; deformable mirror; microelectromechanical devices; micromachining; micromirror; optical distortion; optical pulse shaping; optical-device fabrication; optimization methods; polymer technology;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2007.913075

Filename

4435063