• DocumentCode
    1044091
  • Title

    Method for manufacturing embedded variable capacitors in low-temperature cofired ceramic substrate

  • Author

    Tick, T. ; Palukuru, V. ; Komulainen, M. ; Peräntie, J. ; Jantunen, H.

  • Author_Institution
    Univ. of Oulu, Oulu
  • Volume
    44
  • Issue
    2
  • fYear
    2008
  • Firstpage
    94
  • Lastpage
    95
  • Abstract
    A method for manufacturing embedded variable capacitors (varactors) inside a low-temperature cofired ceramic substrate is presented. A varactor is fabricated by filling a via hole with ferroelectric barium strontium titanate paste. The measured capacitance of the varactor changed from 1.47 to 0.97 pF and the Q factor from 18.2 to 31.5 at 1 GHz when the bias voltage was increased from 0 to 200 V.
  • Keywords
    varactors; capacitance 1.47 pF to 0.97 pF; embedded variable capacitor manufacturing; ferroelectric barium strontium titanate paste; frequency 1 GHz; low-temperature cofired ceramic substrate; varactor capacitance; voltage 0 V to 200 V;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20083014
  • Filename
    4436134