Fabrication of Carbon Nanotube Field-Effect Transistors by Fluidic Alignment Technique

With a fluidic alignment technique for aligning single-walled carbon nanotubes (SWNTs) over a large area on solid substrates, we can assemble SWNTs into parallel arrays with desired average separation. The number of SWNTs in the aligned arrays is controlled by the size of the microfluidic channels and the concentration of SWNTs in suspension. Most of the SWNTs are found to be aligned parallel to the orientation of the microfluidic channels. The performance of carbon nanotube field-effect transistors (CNTFETs) fabricated by this technique and the influences of impurities on the transistor characteristics are discussed.