Title :
Test cells for evaluation of low currents and capacitances CMOS devices
Author :
Nouet, Pascal ; Girard, P.
Abstract :
A method allowing the determination of currents and capacitances in the fA and fF range, respectively, is presented. It consists of a test cell associated with a standard measurement equipment. The principle is described and experimental results illustrate some possibilities of this method.
Keywords :
capacitance measurement; electric current measurement; insulated gate field effect transistors; semiconductor device testing; CMOS devices; capacitances; currents; standard measurement equipment; test cell;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930198
