DocumentCode :
1052825
Title :
Effect of transverse force on the performance of quartz resonator force sensors
Author :
Wang, Zheyao ; Dong, Yonggui ; Zhu, Huizhong ; Feng, Guanping
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Volume :
51
Issue :
4
fYear :
2004
fDate :
4/1/2004 12:00:00 AM
Firstpage :
470
Lastpage :
476
Abstract :
This paper discusses the effect of transverse force on the performance of quartz crystal resonator (QXR) force sensors that use symmetrical incomplete circular QXRs as sensing elements. Based on Lee´s vibration theory and the transverse force-induced stress distribution, frequency changes are derived. This result and finite element method (FEM) are applied to investigate the performance of two metal-quartz combined sensors under the action of transverse force. Analytical and experimental results show that transverse force affects the sensitivity and linearity of QXR force sensors.
Keywords :
crystal resonators; finite element analysis; force measurement; force sensors; stress effects; FEM; Lee´s vibration theory; Lees vibration theory; QXR force sensors; finite element method; linearity; metal quartz combined sensors; quartz crystal resonator force sensors; sensitivity; symmetrical incomplete circular quartz crystal resonator; transverse force induced stress distribution; Acceleration; Electrodes; Finite element methods; Force measurement; Force sensors; Frequency control; Linearity; Stability; Stress; Temperature sensors;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2004.1295433
Filename :
1320812
Link To Document :
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