Title :
RF discharge modeling considering time dependence and spatial nonlocality of the electron energy spectrum
Author :
Feoktistov, V.A. ; Popov, A.M. ; Popovicheva, O.B. ; Rakhimov, A.T. ; Rakhimova, T.V. ; Volkova, E.A.
Author_Institution :
Res. Inst. of Nucl. Phys., Moscow State Univ., USSR
fDate :
4/1/1991 12:00:00 AM
Abstract :
RF discharge modeling in He is performed. New features of modeling are based on the solution of the nonstationary Boltzmann equation in the spatially nonuniform electric field, coupled with the equation for electric field and charged-particle densities. It is shown that the local equilibrium model for the electron energy spectrum in RF discharge is not valid for the pressure range ≃10 torr
Keywords :
Boltzmann equation; electron spectra; helium; high-frequency discharges; plasma density; plasma simulation; 10 torr; He; RF discharge modelling; charged-particle densities; electric field densities; electron energy spectrum; nonstationary Boltzmann equation; spatial nonlocality; spatially nonuniform electric field; time dependence; Boltzmann equation; Couplings; Electron mobility; Glow discharges; Helium; Hydrodynamics; Ionization; Kinetic theory; Nonuniform electric fields; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on
