Title :
Fiber Bragg grating demodulator based on hybrid optical MEMS
Author :
Unamuno, Anartz ; Li, Lijie ; Uttamchandani, Deepak
Author_Institution :
Microsyst. Group, Univ. of Strathclyde, Glasgow, UK
Abstract :
This paper describes the design, experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems (MOEMS) technology. The tunable filter can meet the demodulation requirements for Fiber Bragg grating (FBG) sensors. The hybrid system is built using an off-the-shelf 200-GHz dense wavelength-division multiplexing filter and a movable MEMS platform actuated by a thermal microactuator array fabricated with silicon-on-insulator multiuser MEMS processes. Results show a repeatable tuning range of over 400 pm, which satisfies the demodulation requirements for FBG sensors.
Keywords :
Bragg gratings; demodulation; fibre optic sensors; micro-optics; microactuators; optical communication equipment; optical design techniques; optical fabrication; optical fibre testing; optical filters; optical modulation; optical tuning; silicon-on-insulator; wavelength division multiplexing; fiber Bragg grating demodulator; fiber Bragg grating sensors; hybrid microoptoelectromechanical systems; hybrid optical MEMS; movable MEMS platform; off-the-shelf dense wavelength-division multiplexing filter; repeatable tuning; silicon-on-insulator multiuser MEMS process; thermal microactuator array; tunable optical filter design; Bragg gratings; Demodulation; Fiber gratings; Micromechanical devices; Optical design; Optical fiber filters; Optical filters; Optical sensors; Silicon on insulator technology; Wavelength division multiplexing; FBG; Fiber Bragg grating; MOEMS; microactuators; microoptoelectromechanical systems; microsystems;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2004.830617
