Title :
Automatic laser inspection/laser repair system for masks
Author :
Fehrs, D. ; Munro, Deborah ; Cuthbert, J. ; Yanochko, G.
Author_Institution :
Bell Telephone Laboratories, Inc., Allentown, PA, USA
fDate :
9/1/1975 12:00:00 AM
Keywords :
Glass; High speed optical techniques; Inspection; Integrated circuit yield; Laser beams; Optical attenuators; Optical films; Optical materials; Optical pulses; Xenon;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1975.1068876
