Title :
Laser repair of faulty packaged VLSI chips
Author :
Boyd, I.W. ; Nolan, A.J. ; Nayar, Vineet ; Micheli, F. ; Davidson, A. ; Swanson, G. ; George, Saly
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. Coll. London
fDate :
11/24/1988 12:00:00 AM
Abstract :
Demonstrates for the first time the use of a tightly focused Ar laser beam to repair design defects in completely packaged microelectronic chips by inducing localised micro-etching chemical reactions
Keywords :
VLSI; laser beam machining; VLSI chips; completely packaged microelectronic chips; design defects; laser repair; localised micro-etching chemical reactions;
Journal_Title :
Electronics Letters
