Title :
Magnetic-Actuated Stainless Steel Scanner for Two-Photon Hyperspectral Fluorescence Microscope
Author :
Youmin Wang ; Gokdel, Yigit Daghan ; Triesault, Nicolas ; Lingyun Wang ; Yu-Yen Huang ; Xiaojing Zhang
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We present a fluorescence two-photon laser scanning microscope that uses a soft-magnetic stainless steel microscanner to generate a 2-D Lissajous scanning pattern. The wide-scanning low-voltage driven gimbaled torsional stainless steel microelectromechanical systems (MEMSs) scanner is designed and then fabricated using electrical discharge machining. This technology offers unique advantages by allowing larger mirror surface areas (4 mm (times5) mm) to enhance the fluorescence collection efficiency at low incoming signal level, and providing a rapid prototyping and low-cost alternative to silicon-based MEMS devices, particularly when large displacements and large field of view are required. A maximum total optical scan angle (TOSA) of 20.6° at 112 Hz for a drive power of 200 mW is required for the slow-scan movement, whereas the fast-scan movement occurs at the resonance frequency of 1268 Hz and has a TOSA of 26.6° using a drive power of 400 mW. The soft-magnetic microscanner incorporated in the two-photon hyperspectral fluorescence microscope demonstrates its applicability in two-photon hyperspectral imaging of circulating cancer cells, stem cells, and biological tissue with extrinsic fluorophores.
Keywords :
electrical discharge machining; elemental semiconductors; fluorescence; hyperspectral imaging; magnetic actuators; micromachining; micromirrors; microsensors; optical microscopes; optical scanners; silicon; stainless steel; 2D Lissajous scanning pattern generation; MEMS scanner; Si; TOSA; electrical discharge machining; fluorescence collection efficiency enhancement; fluorescence two-photon laser scaning microscope; frequency 112 Hz; frequency 1268 Hz; gimbaled torsional stainless steel; magnetic actuated stainless steel scanner; microelectromechanical systems; mirror surface; power 200 mW; power 400 mW; rapid prototyping; silicon-based MEMS device; size 4 mm; size 5 mm; soft-magnetic stainless steel microscanner; total optical scan angle; two-photon hyperspectral imaging; Magnetic anisotropy; Magnetic circuits; Micromechanical devices; Microscopy; Mirrors; Steel; Stainless steel microscanner; electrical discharge machining; electrical discharge machining.; hyperspectral imaging; two-photon microscopy;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2014.2308573