Title :
WP-B4 pH ISFET´s using Al2O3, Si3N4, and SiO2gate thin films
Author :
Matsuo, Takuya ; Esashi, Masayoshi ; Abe, H.
fDate :
11/1/1979 12:00:00 AM
Keywords :
Biomedical electrodes; Biomedical engineering; Biomedical transducers; Bridges; Hysteresis; Insulation; Reproducibility of results; Silicon; Stability; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19780
