Title :
Levitation of a micromachined rotor for application in a rotating gyroscope
Author :
Shearwood, C. ; Williams, C.B. ; Mellor, Phil H. ; Gibbs, M.R.J.
Author_Institution :
Dept. of Electron. & Electr. Eng., Sheffield Univ.
fDate :
10/12/1995 12:00:00 AM
Abstract :
The design of a micromachined rotating gyroscope is described, incorporating an electromagnetically levitated aluminium rotor. The coil design for levitation produces good lateral stability. A 400 μm diameter, 12 μm thick rotor is levitated to a height of 30 μm
Keywords :
coils; gyroscopes; magnetic levitation; micromachining; microsensors; rotors; 30 micron; 400 micron; coil design; electromagnetically levitated rotor; lateral stability; micromachined rotor; rotating gyroscope;
Journal_Title :
Electronics Letters
